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Cost-effective PVD coatings in batch systems

Identifieur interne : 000359 ( Main/Exploration ); précédent : 000358; suivant : 000360

Cost-effective PVD coatings in batch systems

Auteurs : B. Engers [Allemagne] ; H. U Bauer [Allemagne]

Source :

RBID : ISTEX:1D73A8FDA23F5E8DA1BF93EA74152A794B4C6AC2

Abstract

The high investment and operating costs for PVD coating systems hamper the broader application of this high technology, especially in smaller and medium sized enterprises. The reduction of these costs to an amount where high quality coatings are economically attractive by their continuous as well as in a two or even a one shift production can only be achieved by the optimized working together of all components of a coating system. The enlargement of the volume of the vacuum chamber is limited by the availability of huge vacuum pumps at reasonable prices but, nevertheless, the number of charges per day can be increased by suitable techniques. Cryopumps, for example, can be applied very successfully, especially with a view to their high pumping speed for water. By optimizing the pumping speed in the chamber for different gases, the consumption of sputter or reactive gases and therefore the amount of pumped gas can also be lowered leading to longer times between regenerations and, eventually to a minimum down time. By combining different coating techniques, also in modified forms, the advantages of them can be used in one process in order to achieve cost effective high quality coatings. For such hybrid processes, the precise tuning of the components working together and the control of the whole process with the needed reliability is absolutely necessary and to achieve with a PLC and appropriate bus systems. Finally, the coating technology used is very important. The production of layer systems for special coating tasks consisting of many layers requires not only high reliability of the working together of all components but also a suitable management of the techniques for the control. This article summarizes the most important problems of cost effective PVD coatings in batch systems and shows possible solutions.


Url:
DOI: 10.1016/S0257-8972(99)00119-X


Affiliations:


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Le document en format XML

<record>
<TEI wicri:istexFullTextTei="biblStruct">
<teiHeader>
<fileDesc>
<titleStmt>
<title>Cost-effective PVD coatings in batch systems</title>
<author>
<name sortKey="Engers, B" sort="Engers, B" uniqKey="Engers B" first="B" last="Engers">B. Engers</name>
</author>
<author>
<name sortKey="Bauer, H U" sort="Bauer, H U" uniqKey="Bauer H" first="H. U" last="Bauer">H. U Bauer</name>
</author>
</titleStmt>
<publicationStmt>
<idno type="wicri:source">ISTEX</idno>
<idno type="RBID">ISTEX:1D73A8FDA23F5E8DA1BF93EA74152A794B4C6AC2</idno>
<date when="1999" year="1999">1999</date>
<idno type="doi">10.1016/S0257-8972(99)00119-X</idno>
<idno type="url">https://api.istex.fr/document/1D73A8FDA23F5E8DA1BF93EA74152A794B4C6AC2/fulltext/pdf</idno>
<idno type="wicri:Area/Main/Corpus">000071</idno>
<idno type="wicri:explorRef" wicri:stream="Main" wicri:step="Corpus" wicri:corpus="ISTEX">000071</idno>
<idno type="wicri:Area/Main/Curation">000071</idno>
<idno type="wicri:Area/Main/Exploration">000359</idno>
<idno type="wicri:explorRef" wicri:stream="Main" wicri:step="Exploration">000359</idno>
</publicationStmt>
<sourceDesc>
<biblStruct>
<analytic>
<title level="a">Cost-effective PVD coatings in batch systems</title>
<author>
<name sortKey="Engers, B" sort="Engers, B" uniqKey="Engers B" first="B" last="Engers">B. Engers</name>
<affiliation wicri:level="1">
<country xml:lang="fr">Allemagne</country>
<wicri:regionArea>AWS Achslagerwerk Staßfurt GmbH, An der Liethe 5, Staßfurt 39418</wicri:regionArea>
<wicri:noRegion>39418</wicri:noRegion>
<wicri:noRegion>Staßfurt 39418</wicri:noRegion>
</affiliation>
<affiliation></affiliation>
<affiliation wicri:level="1">
<country wicri:rule="url">Allemagne</country>
</affiliation>
</author>
<author>
<name sortKey="Bauer, H U" sort="Bauer, H U" uniqKey="Bauer H" first="H. U" last="Bauer">H. U Bauer</name>
<affiliation wicri:level="3">
<country xml:lang="fr">Allemagne</country>
<wicri:regionArea>CTI Cryogenics GmbH, Haasstrasse, 15 64293</wicri:regionArea>
<placeName>
<region type="land" nuts="1">Hesse (Land)</region>
<region type="district" nuts="2">District de Darmstadt</region>
<settlement type="city">Darmstadt</settlement>
</placeName>
</affiliation>
</author>
</analytic>
<monogr></monogr>
<series>
<title level="j">Surface & Coatings Technology</title>
<title level="j" type="abbrev">SCT</title>
<idno type="ISSN">0257-8972</idno>
<imprint>
<publisher>ELSEVIER</publisher>
<date type="published" when="1999">1999</date>
<biblScope unit="vol">116–119</biblScope>
<biblScope unit="supplement">C</biblScope>
<biblScope unit="page" from="705">705</biblScope>
<biblScope unit="page" to="710">710</biblScope>
</imprint>
<idno type="ISSN">0257-8972</idno>
</series>
<idno type="istex">1D73A8FDA23F5E8DA1BF93EA74152A794B4C6AC2</idno>
<idno type="DOI">10.1016/S0257-8972(99)00119-X</idno>
<idno type="PII">S0257-8972(99)00119-X</idno>
</biblStruct>
</sourceDesc>
<seriesStmt>
<idno type="ISSN">0257-8972</idno>
</seriesStmt>
</fileDesc>
<profileDesc>
<textClass></textClass>
</profileDesc>
</teiHeader>
<front>
<div type="abstract" xml:lang="en">The high investment and operating costs for PVD coating systems hamper the broader application of this high technology, especially in smaller and medium sized enterprises. The reduction of these costs to an amount where high quality coatings are economically attractive by their continuous as well as in a two or even a one shift production can only be achieved by the optimized working together of all components of a coating system. The enlargement of the volume of the vacuum chamber is limited by the availability of huge vacuum pumps at reasonable prices but, nevertheless, the number of charges per day can be increased by suitable techniques. Cryopumps, for example, can be applied very successfully, especially with a view to their high pumping speed for water. By optimizing the pumping speed in the chamber for different gases, the consumption of sputter or reactive gases and therefore the amount of pumped gas can also be lowered leading to longer times between regenerations and, eventually to a minimum down time. By combining different coating techniques, also in modified forms, the advantages of them can be used in one process in order to achieve cost effective high quality coatings. For such hybrid processes, the precise tuning of the components working together and the control of the whole process with the needed reliability is absolutely necessary and to achieve with a PLC and appropriate bus systems. Finally, the coating technology used is very important. The production of layer systems for special coating tasks consisting of many layers requires not only high reliability of the working together of all components but also a suitable management of the techniques for the control. This article summarizes the most important problems of cost effective PVD coatings in batch systems and shows possible solutions. </div>
</front>
</TEI>
<affiliations>
<list>
<country>
<li>Allemagne</li>
</country>
<region>
<li>District de Darmstadt</li>
<li>Hesse (Land)</li>
</region>
<settlement>
<li>Darmstadt</li>
</settlement>
</list>
<tree>
<country name="Allemagne">
<noRegion>
<name sortKey="Engers, B" sort="Engers, B" uniqKey="Engers B" first="B" last="Engers">B. Engers</name>
</noRegion>
<name sortKey="Bauer, H U" sort="Bauer, H U" uniqKey="Bauer H" first="H. U" last="Bauer">H. U Bauer</name>
<name sortKey="Engers, B" sort="Engers, B" uniqKey="Engers B" first="B" last="Engers">B. Engers</name>
</country>
</tree>
</affiliations>
</record>

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   |wiki=    Wicri/Informatique
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